BORIES, Mathias; POLZIN, Jana-Isabelle; STEINHAUSER, Bernd; BIVOUR, Martin; BENICK, Jan; HERMLE, Martin; GLUNZ, Stefan. Plasma-Assisted N2O Oxidation (PANO) in an Industrial Direct Plasma Reactor for TOPCon Production. SiliconPV Conference Proceedings, [S. l.], v. 1, 2024. DOI: 10.52825/siliconpv.v1i.838. Disponível em: https://www.tib-op.org/ojs/index.php/siliconpv/article/view/838. Acesso em: 26 may. 2024.