Bories, Mathias, Jana-Isabelle Polzin, Bernd Steinhauser, Martin Bivour, Jan Benick, Martin Hermle, and Stefan Glunz. “Plasma-Assisted N2O Oxidation (PANO) in an Industrial Direct Plasma Reactor for TOPCon Production”. SiliconPV Conference Proceedings 1 (February 22, 2024). Accessed May 14, 2024. https://www.tib-op.org/ojs/index.php/siliconpv/article/view/838.